Authors: PERSCH G BORN C UTESCH B

Citation: G. Persch et al., ULTRATHIN-FILM HARDNESS INVESTIGATIONS BY A MODIFIED ATOMIC-FORCE MICROSCOPE, Applied physics. A, Solids and surfaces, 59(1), 1994, pp. 29-32

Authors: PERSCH G BORN C UTESCH B

Citation: G. Persch et al., NANO-HARDNESS INVESTIGATIONS OF THIN-FILMS BY AN ATOMIC-FORCE MICROSCOPE, Microelectronic engineering, 24(1-4), 1994, pp. 113-121

Authors: PERSCH G BORN C ENGELMANN H KOEHLER K UTESCH B

Citation: G. Persch et al., APPLICATIONS OF SCANNING PROBE MICROSCOPIES IN TECHNOLOGY AND MANUFACTURING, Scanning, 15(5), 1993, pp. 283-290