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Results:
1-3
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Results: 3
Effect of annealing on electrical properties of Pt/beta-SiC contact
Authors:
Na, HJ Jeong, JK Um, MY Kim, BS Hwang, CS Kim, HJ
Citation:
Hj. Na et al., Effect of annealing on electrical properties of Pt/beta-SiC contact, SOL ST ELEC, 45(9), 2001, pp. 1565-1570
Morphological and structural characteristics of homoepitaxial 4H-SiC thin films by chemical vapor deposition using bis-trimethylsilylmethane precursor
Authors:
Jeong, JK Na, HJ Kim, BS Um, MY Kim, HJ
Citation:
Jk. Jeong et al., Morphological and structural characteristics of homoepitaxial 4H-SiC thin films by chemical vapor deposition using bis-trimethylsilylmethane precursor, THIN SOL FI, 377, 2000, pp. 567-572
In-situ low temperature N2O plasma annealing for high-dielectric Ta2O5 thin films
Authors:
Um, MY Lee, SK Kim, HJ
Citation:
My. Um et al., In-situ low temperature N2O plasma annealing for high-dielectric Ta2O5 thin films, J KOR PHYS, 35, 1999, pp. S791-S794
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