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AN ELECTROSTATIC LOWER STATOR AXIAL-GAP POLYSILICON WOBBLE MOTOR, PART 1 - DESIGN AND MODELING
Authors: LEGTENBERG R BERENSCHOT E VANBAAR J ELWENSPOEK M
Citation: R. Legtenberg et al., AN ELECTROSTATIC LOWER STATOR AXIAL-GAP POLYSILICON WOBBLE MOTOR, PART 1 - DESIGN AND MODELING, Journal of microelectromechanical systems, 7(1), 1998, pp. 79-86
AN ELECTROSTATIC LOWER STATOR AXIAL-GAP POLYSILICON WOBBLE MOTOR, PART II - FABRICATION AND PERFORMANCE
Authors: LEGTENBERG R BERENSCHOT E VANBAAR J ELWENSPOEK M
Citation: R. Legtenberg et al., AN ELECTROSTATIC LOWER STATOR AXIAL-GAP POLYSILICON WOBBLE MOTOR, PART II - FABRICATION AND PERFORMANCE, Journal of microelectromechanical systems, 7(1), 1998, pp. 87-93
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