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Results:
1-15
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Results: 15
Authors:
HASEGAWA H
DATE H
OHMORI Y
VENTZEK PLG
SHIMOZUMA M
TAGASHIRA H
Citation: H. Hasegawa et al., MEASUREMENTS OF THE DRIFT VELOCITY OF ELECTRONS IN MIXTURES OF NITROGEN AND CARBON-DIOXIDE FROM 100 TO 1000 TD, Journal of physics. D, Applied physics, 31(6), 1998, pp. 737-741
Authors:
YANG J
VENTZEK PLG
SAKAI Y
DATE H
KITAMORI K
TAGASHIRA H
MEYYAPPAN M
Citation: J. Yang et al., SIMULATIONS OF STEP RESPONSES OF ELECTRONEGATIVE RADIOFREQUENCY CAPACITIVELY COUPLED DISCHARGES, Journal of applied physics, 84(4), 1998, pp. 1848-1858
Authors:
DATE H
VENTZEK PLG
KONDO K
HASEGAWA H
SHIMOZUMA M
TAGASHIRA H
Citation: H. Date et al., SPATIAL CHARACTERISTICS OF ELECTRON SWARM PARAMETERS IN GASES, Journal of applied physics, 83(8), 1998, pp. 4024-4029
Authors:
BUIE MJ
PENDER JTP
VENTZEK PLG
Citation: Mj. Buie et al., A METHOD FOR IDENTIFYING SOURCES OF REACTIVE ION ETCH LAG AND LOADINGIN A MAGNETICALLY ENHANCED REACTIVE ION ETCHER, JPN J A P 1, 36(7B), 1997, pp. 4838-4844
Authors:
YANG J
VENTZEK PLG
SUGAWARA H
SAKAI Y
KITAMORI K
TAGASHIRA H
Citation: J. Yang et al., STEP RESPONSES OF RADIOFREQUENCY CAPACITIVELY COUPLED DISCHARGES, Journal of applied physics, 82(5), 1997, pp. 2093-2105
Authors:
YAMADA N
VENTZEK PLG
DATE H
SAKAI Y
TAGASHIRA H
Citation: N. Yamada et al., MODEL FOR A LARGE-AREA MULTIFREQUENCY MULTIPLANAR COIL INDUCTIVELY-COUPLED PLASMA SOURCE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(5), 1996, pp. 2859-2870
Authors:
BUIE MJ
PENDER JTP
HOLLOWAY JP
VINCENT T
VENTZEK PLG
BRAKE ML
Citation: Mj. Buie et al., ABELS INVERSION APPLIED TO EXPERIMENTAL SPECTROSCOPIC DATA WITH OFF-AXIS PEAKS, Journal of quantitative spectroscopy & radiative transfer, 55(2), 1996, pp. 231-243
Authors:
VENTZEK PLG
SUZUKI M
DATE H
SAKAI Y
TAGASHIRA H
KITAMORI K
Citation: Plg. Ventzek et al., A 2-DIMENSIONAL MODEL OF LASER-ABLATION OF FROZEN CL-2 - A POSSIBLE NEUTRAL BEAM SOURCE FOR ETCHING APPLICATIONS, Journal of applied physics, 80(2), 1996, pp. 1146-1155
Authors:
DATE H
VENTZEK PLG
SHIMOZUMA M
TAGASHIRA H
Citation: H. Date et al., ELECTRON SWARM PARAMETERS IN RAMP ELECTRIC-FIELDS, Journal of applied physics, 79(6), 1996, pp. 2902-2908
Authors:
YAMADA N
VENTZEK PLG
SAKAI Y
TAGASHIRA H
KITAMORI K
Citation: N. Yamada et al., SIMULATIONS OF A FEEDBACK-CONTROL SCHEME FOR AN INDUCTIVELY-COUPLED PLASMA SOURCE FOR ETCHING APPLICATIONS, Journal of the Electrochemical Society, 143(4), 1996, pp. 1375-1383
Authors:
VENTZEK PLG
YAMADA N
SAKAI Y
TAGASHIRA H
KITAMORI K
Citation: Plg. Ventzek et al., SIMULATIONS OF REAL-TIME CONTROL OF 2-DIMENSIONAL FEATURES IN INDUCTIVELY-COUPLED PLASMA SOURCES FOR ETCHING APPLICATIONS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(5), 1995, pp. 2456-2463
Authors:
VENTZEK PLG
GRAPPERHAUS M
KUSHNER MJ
Citation: Plg. Ventzek et al., INVESTIGATION OF ELECTRON SOURCE AND ION FLUX UNIFORMITY IN HIGH PLASMA-DENSITY INDUCTIVELY-COUPLED ETCHING TOOLS USING 2-DIMENSIONAL MODELING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3118-3137
Authors:
VENTZEK PLG
HOEKSTRA RJ
KUSHNER MJ
Citation: Plg. Ventzek et al., 2-DIMENSIONAL MODELING OF HIGH PLASMA-DENSITY INDUCTIVELY-COUPLED SOURCES FOR MATERIALS PROCESSING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(1), 1994, pp. 461-477
Authors:
VENTZEK PLG
KITAMORI K
Citation: Plg. Ventzek et K. Kitamori, HIGHER-ORDER SAMPLING STRATEGIES IN MONTE-CARLO SIMULATIONS OF ELECTRON-ENERGY DISTRIBUTION-FUNCTIONS IN PLASMAS, Journal of applied physics, 75(8), 1994, pp. 3785-3788
Authors:
VENTZEK PLG
SOMMERER TJ
HOEKSTRA RJ
KUSHNER MJ
Citation: Plg. Ventzek et al., 2-DIMENSIONAL HYBRID MODEL OF INDUCTIVELY-COUPLED PLASMA SOURCES FOR ETCHING, Applied physics letters, 63(5), 1993, pp. 605-607
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1-15
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