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Results:
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Results: 23
Authors:
LANG HP
BERGER R
BATTISTON F
RAMSEYER JP
MEYER E
ANDREOLI C
BRUGGER J
VETTIGER P
DESPONT M
MEZZACASA T
SCANDELLA L
GUNTHERODT HJ
GERBER C
GIMZEWSKI JK
Citation: Hp. Lang et al., A CHEMICAL SENSOR-BASED ON A MICROMECHANICAL CANTILEVER ARRAY FOR THEIDENTIFICATION OF GASES AND VAPORS, Applied physics A: Materials science & processing, 66, 1998, pp. 61-64
Authors:
STRECKEISEN P
RAST S
WATTINGER C
MEYER E
VETTIGER P
GERBER C
GUNTHERODT HJ
Citation: P. Streckeisen et al., INSTRUMENTAL ASPECTS OF MAGNETIC-RESONANCE FORCE MICROSCOPY, Applied physics A: Materials science & processing, 66, 1998, pp. 341-344
Authors:
LORENZ H
DESPONT M
VETTIGER P
RENAUD P
Citation: H. Lorenz et al., FABRICATION OF PHOTOPLASTIC HIGH-ASPECT-RATIO MICROPARTS AND MICROMOLDS USING SU-8 UV RESIST, Microsystem technologies, 4(3), 1998, pp. 143-146
Authors:
DELLMANN L
ROTH S
BEURET C
PARATTE L
RACINE GA
LORENZ H
DESPONT M
RENAUD P
VETTIGER P
DEROOIJ NF
Citation: L. Dellmann et al., 2 STEPS MICROMOULDING AND PHOTOPOLYMER HIGH-ASPECT-RATIO STRUCTURING FOR APPLICATIONS IN PIEZOELECTRIC MOTOR COMPONENTS, Microsystem technologies, 4(3), 1998, pp. 147-150
Authors:
DELLMANN L
ROTH S
BEURET C
RACINE GA
LORENZ H
DESPONT M
RENAUD P
VETTIGER P
DEROOIJ NF
Citation: L. Dellmann et al., FABRICATION PROCESS OF HIGH-ASPECT-RATIO ELASTIC AND SU-8 STRUCTURES FOR PIEZOELECTRIC MOTOR APPLICATIONS, Sensors and actuators. A, Physical, 70(1-2), 1998, pp. 42-47
Authors:
BRUGGER J
BELJAKOVIC G
DESPONT M
BIEBUYCK H
DEROOIJ NF
VETTIGER P
Citation: J. Brugger et al., LOW-CAST PDMS SEAL RING FOR SINGLE-SIDE WET ETCHING OF MEMS STRUCTURES, Sensors and actuators. A, Physical, 70(1-2), 1998, pp. 191-194
Authors:
AKIYAMA T
TONIN A
HIDBER HR
BRUGGER J
VETTIGER P
STAUFER U
DEROOIJ NF
Citation: T. Akiyama et al., CHARACTERIZATION OF AN INTEGRATED FORCE SENSOR-BASED ON A MOS-TRANSISTOR FOR APPLICATIONS IN SCANNING FORCE MICROSCOPY, Sensors and actuators. A, Physical, 64(1), 1998, pp. 1-6
Authors:
LORENZ H
DESPONT M
FAHRNI N
BRUGGER J
VETTIGER P
RENAUD P
Citation: H. Lorenz et al., HIGH-ASPECT-RATIO, ULTRATHICK, NEGATIVE-TONE NEAR-UV PHOTORESIST AND ITS APPLICATIONS FOR MEMS, Sensors and actuators. A, Physical, 64(1), 1998, pp. 33-39
Authors:
WILLEMIN M
ROSSEL C
BRUGGER J
DESPONT MH
ROTHUIZEN H
VETTIGER P
HOFER J
KELLER H
Citation: M. Willemin et al., PIEZORESISTIVE CANTILEVER DESIGNED FOR TORQUE MAGNETOMETRY, Journal of applied physics, 83(3), 1998, pp. 1163-1170
Authors:
LANG HP
BERGER R
ANDREOLI C
BRUGGER J
DESPONT M
VETTIGER P
GERBER C
GIMZEWSKI JK
RAMSEYER JP
MEYER E
GUNTHERODT HJ
Citation: Hp. Lang et al., SEQUENTIAL POSITION READOUT FROM ARRAYS OF MICROMECHANICAL CANTILEVERSENSORS, Applied physics letters, 72(3), 1998, pp. 383-385
Authors:
LORENZ H
DESPONT M
FAHRNI N
LABIANCA N
RENAUD P
VETTIGER P
Citation: H. Lorenz et al., SU-8 - A LOW-COST NEGATIVE RESIST FOR MEMS, Journal of micromechanics and microengineering, 7(3), 1997, pp. 121-124
Authors:
BRUGGER J
BELJAKOVIC G
DESPONT M
DEROOIJ NF
VETTIGER P
Citation: J. Brugger et al., SILICON MICRO NANOMECHANICAL DEVICE FABRICATION BASED ON FOCUSED ION-BEAM SURFACE MODIFICATION AND KOH ETCHING/, Microelectronic engineering, 35(1-4), 1997, pp. 401-404
Authors:
ROTHUIZEN H
PRONGUE D
VASEY F
VETTIGER P
Citation: H. Rothuizen et al., A CONIC PRIMITIVE-BASED PATTERN GENERATOR FOR ELECTRON-BEAM LITHOGRAPHY OF DIFFRACTIVE OPTICAL-ELEMENTS, Microelectronic engineering, 34(3-4), 1997, pp. 243-260
Authors:
DESPONT M
BELJAKOVIC G
STEBLER C
STAUFER U
VETTIGER P
DEROOIJ NF
Citation: M. Despont et al., FABRICATION OF AN INTEGRATED SILICON-BASED LENS FOR LOW-ENERGY MINIATURIZED ELECTRON COLUMNS, JPN J A P 1, 35(12B), 1996, pp. 6641-6647
Authors:
VETTIGER P
STAUFER U
KERN DP
Citation: P. Vettiger et al., SPECIAL ISSUE ON NANOTECHNOLOGY - PREFACE, Microelectronic engineering, 32(1-4), 1996, pp. 1-2
Authors:
DESPONT M
STAUFER U
STEBLER C
GROSS H
VETTIGER P
Citation: M. Despont et al., ELECTRON-BEAM MICROCOLUMN FABRICATION AND TESTING, Microelectronic engineering, 30(1-4), 1996, pp. 69-72
Authors:
HUNZIKER W
VOGT W
MELCHIOR H
BUCHMANN P
VETTIGER P
Citation: W. Hunziker et al., PASSIVE SELF-ALIGNED LOW-COST PACKAGING OF SEMICONDUCTOR-LASER ARRAYSON SI MOTHERBOARD, IEEE photonics technology letters, 7(11), 1995, pp. 1324-1326
Authors:
LEHMANN HW
STAUFER U
VETTIGER P
Citation: Hw. Lehmann et al., PROCEEDINGS OF THE INTERNATIONAL-CONFERENCE ON MICROFABRICATION AND NANOFABRICATION SEPTEMBER 26-29, 1994 DAVOS, SWITZERLAND, Microelectronic engineering, 27(1-4), 1995, pp. 7-8
Authors:
PRONGUE D
ROTHUIZEN H
VASEY F
VETTIGER P
Citation: D. Prongue et al., ENHANCED E-BEAM SYSTEM FOR THE FABRICATION OF OPTICAL-ELEMENTS, Microelectronic engineering, 27(1-4), 1995, pp. 163-166
Authors:
DESPONT M
STAUFER U
STEBLER C
GERMANN R
VETTIGER P
Citation: M. Despont et al., MICROFABRICATION OF LENSES FOR A MINIATURIZED ELECTRON COLUMN, Microelectronic engineering, 27(1-4), 1995, pp. 467-470
Authors:
VASEY F
PRONGUE D
ROTHUIZEN H
VETTIGER P
Citation: F. Vasey et al., ELECTRON-BEAM LITHOGRAPHY OF CURVED STRUCTURES WITH AN ENHANCED VECTOR-SCAN PATTERN GENERATOR SUPPORTING CONIC-BASED PRIMITIVES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3460-3464
Authors:
JACKSON KP
FLINT EB
CINA MF
LACEY D
KWARK Y
TREWHELLA JM
CAULFIELD T
BUCHMANN P
HARDER C
VETTIGER P
Citation: Kp. Jackson et al., A HIGH-DENSITY, 4-CHANNEL, OEIC TRANSCEIVER MODULE UTILIZING PLANAR-PROCESSED OPTICAL WAVE-GUIDES AND FLIP-CHIP, SOLDER-BUMP TECHNOLOGY, Journal of lightwave technology, 12(7), 1994, pp. 1185-1191
Authors:
TANG WC
ALTENDORF EH
ROSEN HJ
WEBB DJ
VETTIGER P
Citation: Wc. Tang et al., LIFETIME EXTENSION OF UNCOATED ALGAAS SINGLE-QUANTUM-WELL LASERS BY HIGH-POWER BURN-IN IN INERT ATMOSPHERES, Electronics Letters, 30(2), 1994, pp. 143-145
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1-23
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