Citation: G. Viera et al., SI-C-N NANOMETRIC POWDER PRODUCED IN SQUARE-WAVE MODULATED RF GLOW-DISCHARGES, DIAMOND AND RELATED MATERIALS, 7(2-5), 1998, pp. 407-411
Authors:
BERTRAN E
SHARMA SN
VIERA G
COSTA J
STAHEL P
CABARROCAS PRI
Citation: E. Bertran et al., EFFECT OF THE NANOPARTICLES ON THE STRUCTURE AND CRYSTALLIZATION OF AMORPHOUS-SILICON THIN-FILMS PRODUCED BY RF GLOW-DISCHARGE, Journal of materials research, 13(9), 1998, pp. 2476-2479
Citation: G. Viera et al., NANOPOWDER OF SILICON-NITRIDE PRODUCED IN RADIO-FREQUENCY MODULATED GLOW-DISCHARGES FROM SIH4 AND NH3, Surface & coatings technology, 101(1-3), 1998, pp. 55-58
Citation: Jl. Andujar et al., OPTICAL-EMISSION SPECTROSCOPY OF RF GLOW-DISCHARGES OF METHANE-SILANEMIXTURES, Thin solid films, 317(1-2), 1998, pp. 120-123
Authors:
CABARROCAS PRI
HAMMA S
SHARMA SN
VIERA G
BERTRAN E
COSTA J
Citation: Pri. Cabarrocas et al., NANOPARTICLE FORMATION IN LOW-PRESSURE SILANE PLASMAS - BRIDGING THE GAP BETWEEN A-SI-H AND MU-C-SI FILMS, Journal of non-crystalline solids, 230, 1998, pp. 871-875
Authors:
VIERA G
SHARMA SN
COSTA J
ZHANG RQ
ANDUJAR JL
BERTRAN E
Citation: G. Viera et al., EFFECTS OF THERMAL AND LASER ANNEALING ON SILICON-CARBIDE NANOPOWDER PRODUCED IN RADIO-FREQUENCY GLOW-DISCHARGE, DIAMOND AND RELATED MATERIALS, 6(10), 1997, pp. 1559-1563
Authors:
VIERA G
SHARMA SN
COSTA J
ZHANG RQ
ANDUJAR JL
BERTRAN E
Citation: G. Viera et al., SILICON-CARBIDE NANOPARTICLES FOR ADVANCED MATERIALS PRODUCED IN RADIO-FREQUENCY MODULATED GLOW-DISCHARGES, Vacuum, 48(7-9), 1997, pp. 665-668
Citation: E. Bertran et al., PRODUCTION OF NANOMETRIC PARTICLES IN RADIO-FREQUENCY GLOW-DISCHARGESIN MIXTURES OF SILANE AND METHANE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(2), 1996, pp. 567-571
Authors:
COURTEILLE C
HOLLENSTEIN C
DORIER JL
GAY P
SCHWARZENBACH W
HOWLING AA
BERTRAN E
VIERA G
MARTINS R
MACARICO A
Citation: C. Courteille et al., PARTICLE AGGLOMERATION STUDY IN RF SILANE PLASMAS - IN-SITU STUDY BY POLARIZATION-SENSITIVE LASER-LIGHT SCATTERING, Journal of applied physics, 80(4), 1996, pp. 2069-2078