Citation: O. Parriaux et al., SPATIAL-FREQUENCY BANDWIDTH IN THE PHOTOLITHOGRAPHIC TRANSFER OF SUBMICRON GRATINGS, Optical engineering, 34(9), 1995, pp. 2657-2659
Authors:
VOIRIN G
PARRIAUX O
VUILLIOMENET H
WILDI R
BENNER U
SCHNEIDER SMOL
Citation: G. Voirin et al., USING CONVENTIONAL PHOTOLITHOGRAPHIC GLASS MASKS AS HIGH-EFFICIENCY PHASE GRATINGS, Optical engineering, 34(9), 1995, pp. 2687-2690