Authors:
Van den hove, L
Foroudhi, R
Jeppsson, B
Goebel, P
McLaughlin, PF
Chisolm, S
van den Hoek, W
Granneman, E
Parodi, M
Brissenden, JL
Jackson, J
Dance, DL
Berger, R
Younger, P
Citation: L. Van Den Hove et al., 1999 Roadmap: Solutions and caveats, SOL ST TECH, 43(5), 2000, pp. 76
Citation: L. Van Den Hove et al., Proceedings of the International Conference on Micro- and Nanofabrication - September 22-24, 1998 - Leuven, Belgium - Preface, MICROEL ENG, 46(1-4), 1999, pp. 1-1
Authors:
Sugihara, T
Van Roey, F
Goethals, AM
Ronse, K
Van den hove, L
Citation: T. Sugihara et al., Resist surface investigations for reduction of line-edge-roughness in top surface imaging technology, MICROEL ENG, 46(1-4), 1999, pp. 339-343