Authors:
Volk, CP
Novikov, YA
Ozerin, YV
Rakov, AV
Citation: Cp. Volk et al., Accuracy of measurement of microrelief dimensions from a scanning electronmicroscope image of a cleavage, MEAS TECH R, 44(4), 2001, pp. 365-369
Citation: Cp. Volk et al., SEM calibration in the micrometer and submicrometer ranges by means of a periodic linear measure, MEAS TECH R, 43(4), 2000, pp. 346-352