Authors:
KALBITZER S
WILBERTZ C
MILLER T
KNOBLAUCH A
Citation: S. Kalbitzer et al., ION-BEAM MODIFICATION FOR SUBMICRON TECHNOLOGY, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 113(1-4), 1996, pp. 154-160
Citation: Kl. Bhatia et al., EFFECT OF ION-BEAM-INDUCED DISORDER ON OPTICAL INTERBAND-TRANSITIONS IN SI AND GAAS, Radiation effects and defects in solids, 128(4), 1994, pp. 341-355
Citation: T. Maisch et al., ENERGY SPREAD OF A FOCUSED ION-BEAM SYSTEM WITH A SUPERTIP, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 80-1, 1993, pp. 1288-1291