Authors:
HECTOR S
POL V
KRASNOPEROVA A
MALDONADO J
FLAMHOLZ A
HEALD D
STAHLHAMMER C
GALBURT D
AMODEO R
DONOHUE T
WIND S
BUCHIGNIANO J
VISWANATHAN R
KHAN M
BOLLEPALLI S
CERRINA F
Citation: S. Hector et al., X-RAY-LITHOGRAPHY FOR LESS-THAN-OR-EQUAL-TO-100 NM GROUND RULES IN COMPLEX PATTERNS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(6), 1997, pp. 2517-2521
Authors:
WANN C
ASSADERAGHI F
SHI LT
CHAN K
COHEN S
HOVEL H
JENKINS K
LEE Y
SADANA D
VISWANATHAN R
WIND S
TAUR Y
Citation: C. Wann et al., HIGH-PERFORMANCE 0.07-MU-M CMOS WITH 9.5-PS GATE DELAY AND 150 GHZ F(T), IEEE electron device letters, 18(12), 1997, pp. 625-627
Authors:
SAENGER KL
CABRAL C
CLEVENGER LA
ROY RA
WIND S
Citation: Kl. Saenger et al., A KINETIC-STUDY OF THE C49 TO C54 TISI2 CONVERSION USING ELECTRICAL-RESISTIVITY MEASUREMENTS ON SINGLE NARROW LINES, Journal of applied physics, 78(12), 1995, pp. 7040-7044
Authors:
TAUR Y
COHEN S
WIND S
LII T
HSU C
QUINLAN D
CHANG CA
BUCHANAN D
AGNELLO P
MII YJ
REEVES C
ACOVIC A
KESAN V
Citation: Y. Taur et al., EXPERIMENTAL 0.1-MU-M P-CHANNEL MOSFET WITH P-POLYSILICON GATE ON 35-ANGSTROM GATE OXIDE(), IEEE electron device letters, 14(6), 1993, pp. 304-306