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Authors: SMIRNOVA TP YAKOVKINA LV
Citation: Tp. Smirnova et Lv. Yakovkina, THE MECHANISM OF DEHYDROGENATION OF SINX-H FILMS, Thin solid films, 293(1-2), 1997, pp. 6-10

Authors: SMIRNOVA TP YAKOVKINA LV AMOSOV YI DANILOVICH OV
Citation: Tp. Smirnova et al., DOWNSTREAM PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION OF SINX-H FILMS FROM HEXAMETHYLCYCLOTRISILAZANE, Inorganic materials, 32(6), 1996, pp. 615-619
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