Authors: SMIRNOVA TP YAKOVKINA LV

Citation: Tp. Smirnova et Lv. Yakovkina, THE MECHANISM OF DEHYDROGENATION OF SINX-H FILMS, Thin solid films, 293(1-2), 1997, pp. 6-10

Authors: SMIRNOVA TP YAKOVKINA LV AMOSOV YI DANILOVICH OV

Citation: Tp. Smirnova et al., DOWNSTREAM PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION OF SINX-H FILMS FROM HEXAMETHYLCYCLOTRISILAZANE, Inorganic materials, 32(6), 1996, pp. 615-619