Authors:
YAMADA A
SAKAMOTO K
YAMAZAKI S
KOBAYASHI K
SAGO S
OONO M
WATANABE H
YASUDA H
Citation: A. Yamada et al., DEFLECTOR AND CORRECTION COIL CALIBRATIONS IN AN ELECTRON-BEAM BLOCK EXPOSURE SYSTEM, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3404-3408