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Results: 2

Authors: Yuh, HK Park, JW Lim, SH Hwang, KH Yoon, E
Citation: Hk. Yuh et al., Low-temperature Si epitaxial growth on oxide patterned wafers by ultrahighvacuum electron cyclotron resonance chemical vapor deposition, J VAC SCI B, 19(2), 2001, pp. 323-326

Authors: Lim, SH Park, JW Yuh, HK Yoon, E Lee, SI
Citation: Sh. Lim et al., Dry cleaning of fluorocarbon residues by low-power electron cyclotron resonance hydrogen plasma, J KOR PHYS, 33, 1998, pp. S108-S111
Risultati: 1-2 |