Authors:
de Sanchez, NA
Rincon, C
Zambrano, G
Prieto, P
Citation: Na. De Sanchez et al., Characterization of the plasma during the growth of CNx films by RF magnetron sputtering, PHYS ST S-B, 220(1), 2000, pp. 697-701
Authors:
Sanchez, NA
Rincon, C
Zambrano, G
Galindo, H
Prieto, P
Citation: Na. Sanchez et al., Characterization of diamond-like carbon (DLC) thin films prepared by r.f. magnetron sputtering, THIN SOL FI, 373(1-2), 2000, pp. 247-250