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Authors: Szczyrbowski, J Brauer, G Ruske, M Schilling, H Zmelty, A

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Authors: Brauer, G Ruske, M Szczyrbowski, J Teschner, G Zmelty, A

Citation: G. Brauer et al., Mid frequency sputtering with TwinMag (R) - a survey of recent results, VACUUM, 51(4), 1998, pp. 655-659