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Results: 1-3 |
Results: 3
New method for an accurate determination of residual strain in polycrystalline silicon films by analysing resonant frequencies of micromachined beams
Authors: Ikehara, T Zwijze, RAF Ikeda, K
Citation: T. Ikehara et al., New method for an accurate determination of residual strain in polycrystalline silicon films by analysing resonant frequencies of micromachined beams, J MICROM M, 11(1), 2001, pp. 55-60
Low-cost piezoresistive silicon load cell independent of force distribution
Authors: Zwijze, RAF Wiegerink, RJ Krijnen, GJM Lammerink, TSJ Elwenspoek, M
Citation: Raf. Zwijze et al., Low-cost piezoresistive silicon load cell independent of force distribution, J MICROM M, 10(2), 2000, pp. 200-203
Low creep and hysteresis load cell based on a force-to-fluid pressure transformation
Authors: Zwijze, RAF Wiegerink, RJ Krijnen, GJM Lammerink, TSJ Elwenspoek, M
Citation: Raf. Zwijze et al., Low creep and hysteresis load cell based on a force-to-fluid pressure transformation, SENS ACTU-A, 78(2-3), 1999, pp. 74-80
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