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Results:
1-7
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Results: 7
Authors:
Jensen, BD
de Boer, MP
Masters, ND
Bitsie, F
LaVan, DA
Citation: Bd. Jensen et al., Interferometry of actuated microcantilevers to determine material properties and test structure nonidealities in MEMS, J MICROEL S, 10(3), 2001, pp. 336-346
Authors:
Kushmerick, JG
Hankins, MG
de Boer, MP
Clews, PJ
Carpick, RW
Bunker, BC
Citation: Jg. Kushmerick et al., The influence of coating structure on micromachine stiction, TRIBOL LETT, 10(1-2), 2001, pp. 103-108
Authors:
de Boer, MP
Mayer, TM
Citation: Mp. De Boer et Tm. Mayer, Tribology of MEMS, MRS BULL, 26(4), 2001, pp. 302-304
Authors:
Mayer, TM
de Boer, MP
Shinn, ND
Clews, PJ
Michalske, TA
Citation: Tm. Mayer et al., Chemical vapor deposition of fluoroalkylsilane monolayer films for adhesion control in microelectromechanical systems, J VAC SCI B, 18(5), 2000, pp. 2433-2440
Authors:
Bunker, BC
Carpick, RW
Assink, RA
Thomas, ML
Hankins, MG
Voigt, JA
Sipola, D
de Boer, MP
Gulley, GL
Citation: Bc. Bunker et al., The impact of solution agglomeration on the deposition of self-assembled monolayers, LANGMUIR, 16(20), 2000, pp. 7742-7751
Authors:
Sniegowski, JJ
de Boer, MP
Citation: Jj. Sniegowski et Mp. De Boer, IC-compatible polysilicon surface micromachining, ANN R MATER, 30, 2000, pp. 299-333
Authors:
de Boer, MP
Michalske, TA
Citation: Mp. De Boer et Ta. Michalske, Accurate method for determining adhesion of cantilever beams, J APPL PHYS, 86(2), 1999, pp. 817-827
Risultati:
1-7
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