RAPID FAILURE ANALYSIS USING CONTAMINATION-DEFECT-FAULT (CDF) SIMULATION

Authors
Citation
J. Khare et W. Maly, RAPID FAILURE ANALYSIS USING CONTAMINATION-DEFECT-FAULT (CDF) SIMULATION, IEEE transactions on semiconductor manufacturing, 9(4), 1996, pp. 518-526
Citations number
25
Categorie Soggetti
Engineering, Eletrical & Electronic","Engineering, Manufacturing","Physics, Applied
ISSN journal
08946507
Volume
9
Issue
4
Year of publication
1996
Pages
518 - 526
Database
ISI
SICI code
0894-6507(1996)9:4<518:RFAUC(>2.0.ZU;2-R
Abstract
This paper describes a new methodology for rapid failure analysis, The methodology is based on the contamination-defect-fault (CDF) simulato r CODEF, which is able to map the effects of contamination deposited o n an IC cell during any stage of the manufacturing process, onto circu it-level faults. The utilization of CODEF's capabilities-in both singl e contamination mode and Monte Carlo mode-in speeding up failure analy sis is illustrated in the paper with examples.