Js. Kenney et al., YIELD MODELING OF ACOUSTIC CHARGE-TRANSPORT TRANSVERSAL FILTERS, IEEE transactions on semiconductor manufacturing, 8(2), 1995, pp. 207-213
This paper presents a yield model for acoustic charge transport transv
ersal filters. This model differs from previous IC yield models in tha
t it does not assume that individual failures of the nondestructive se
nsing taps necessarily cause a device failure. A redundancy in the num
ber of taps included in the design is explained. Poisson statistics ar
e used to describe the tap failures, weighted over a uniform defect de
nsity distribution, A representative design example is presented. The
minimum number of taps needed to realize the filter is calculated, and
tap weights for various numbers of redundant taps are calculated. The
critical area for device failure is calculated for each level of redu
ndancy. Yield is predicted for a range of defect densities and redunda
ncies. To verify the model, a Monte Carlo simulation is performed on a
n equivalent circuit model of the device. The results of the yield mod
el are then compared to the Monte Carlo simulation. Better than 95% ag
reement was obtained for the Poisson model with redundant taps ranging
from 30% to 150% over the minimum.