Rs. Collica et al., SRAM BITMAP SHAPE-RECOGNITION AND SORTING USING NEURAL NETWORKS, IEEE transactions on semiconductor manufacturing, 8(3), 1995, pp. 326-332
This paper details the use of neural network technologies in the chara
cterization of bit fail patterns occurring on SRAM chips as an alterna
tive to the more traditional rule-based or knowledge-based approach to
fail pattern occurrence and classification analysis, The results of b
it fail pattern count analyses are used both for fault analysis post-p
rocessing and manufacturing yield improvement methodologies, The move
toward neural network implementation comes in response to prohibitivel
y long processing times required for implementation of rule-based algo
rithms on more complex devices and the added flexibility of a neural n
etwork to learn new fail types in a more adaptive mode, An unsupervise
d approach to fail pattern identification was implemented on a 128 K S
RAM chip using a two-layer Kohonen Self Organizing Map for identificat
ion and concurrence of bit fail pattern categories within SRAM chips,
A second network utilized a multilayer perceptron (MLP) architecture w
ith backpropagation of error for prediction of the number of occurrenc
es per bitmap of each of the 34 previously identified shape types, The
MLP used the output of a SOM as its input vector to assist in the fea
ture extraction by shape type, Both trained networks out-performed exi
sting rule-based algorithms both in ability to identify bit fail patte
rn types, frequency counts, and speed of processing.