A FRAMEWORK FOR ROBUST RUN BY RUN CONTROL WITH LOT DELAYED MEASUREMENTS

Authors
BARAS JS PATEL NS
Citation
Js. Baras et Ns. Patel, A FRAMEWORK FOR ROBUST RUN BY RUN CONTROL WITH LOT DELAYED MEASUREMENTS, IEEE transactions on semiconductor manufacturing, 10(1), 1997, pp. 75-83
Citations number
21
Categorie Soggetti
Engineering, Eletrical & Electronic","Engineering, Manufacturing","Physics, Applied
Journal title
IEEE transactions on semiconductor manufacturing → ACNP
ISSN journal
08946507
Volume
10
Issue
1
Year of publication
1997
Pages
75 - 83
Database
ISI
SICI code
0894-6507(1997)10:1<75:AFFRRB>2.0.ZU;2-S
Abstract
This paper considers the run by run control problem. We develop a fram ework to solve such a problem in a robust fashion. The framework also encompasses the case when the system is subject to delayed measurement s. Recent results available for the control of such systems are review ed, and two examples are presented. The first example is based on the end-pointing problem for a deposition process, and is subject to noise which has both Gaussian and uniform components, The second one is con cerned with rate control in an LPCVD reactor.