CLOSED-LOOP MEASUREMENT OF EQUIPMENT EFFICIENCY AND EQUIPMENT CAPACITY

Formal definitions for the components of efficiency and capacity, math ematical formulas for computing overall efficiency, and data collectio n strategies are proposed for rigorous measurement of equipment effici ency and equipment capacity, Measurement of overall equipment efficien cy (GEE) under the TPM paradigm is extended to support the maintenance of capacity parameters for production planning, The weaknesses of equ ipment analyzes based on utilization and aggregate UPH (units per hour ) figures are contrasted against the robustness of the proposed approa ch, Applications in semiconductor factories are discussed.