NEW ALTERNATIVE GRAPHING METHODS FOR THIN-FILM INTERFEROMETRY DATA

Authors
MAYNARD HL HERSHKOWITZ N
Citation
Hl. Maynard et N. Hershkowitz, NEW ALTERNATIVE GRAPHING METHODS FOR THIN-FILM INTERFEROMETRY DATA, IEEE transactions on semiconductor manufacturing, 6(4), 1993, pp. 373-377
Citations number
13
Categorie Soggetti
Physics, Applied","Engineering, Eletrical & Electronic
Journal title
IEEE transactions on semiconductor manufacturing → ACNP
ISSN journal
08946507
Volume
6
Issue
4
Year of publication
1993
Pages
373 - 377
Database
ISI
SICI code
0894-6507(1993)6:4<373:NAGMFT>2.0.ZU;2-3
Abstract
Thin-film interferometry has long been used to monitor deposition and etching processes. This paper presents Lissajous and phase-space graph s of thin-film interferometry traces and discusses some of the practic al implications of graphing the data in these non-traditional formats. These types of graphs can highlight certain process events and provid e a more user-friendly operator interface for the control of thin-film etching and deposition processes.