DESIGN CONSIDERATIONS FOR A GAUDI TEST STRUCTURE WHICH CAN BE USED TODETERMINE THE OPTIMUM FOCUS

Authors
FALLON M WALTON AJ STEVENSON JTM ROSS AWS
Citation
M. Fallon et al., DESIGN CONSIDERATIONS FOR A GAUDI TEST STRUCTURE WHICH CAN BE USED TODETERMINE THE OPTIMUM FOCUS, IEEE transactions on semiconductor manufacturing, 7(3), 1994, pp. 272-278
Citations number
6
Categorie Soggetti
Engineering, Eletrical & Electronic","Engineering, Manufacturing","Physics, Applied
Journal title
IEEE transactions on semiconductor manufacturing → ACNP
ISSN journal
08946507
Volume
7
Issue
3
Year of publication
1994
Pages
272 - 278
Database
ISI
SICI code
0894-6507(1994)7:3<272:DCFAGT>2.0.ZU;2-7
Abstract
A test structure is described which can be used to optimize the focus of wafer steppers. Simulation is used to examine the effect that some of the design parameters have on the sensitivity of the structure. Fin ally some practical measurements are presented.