MODELING AND SIMULATION OF AN ELECTRONIC-COMPONENT MANUFACTURING SYSTEM USING HYBRID PETRI NETS

Modeling and analysis for the design and operation of manufacturing sy stems is a vital need. For semiconductor manufacturing systems, which are large scale systems, discrete Petri nets do not constitute an adeq uate tool for modeling and analysis. In fact, use of discrete Petri ne ts is confronted with the state explosion and the high cost of simulat ion. In this paper, hybrid Petri nets are presented as powerful tools for modeling and simulation of semiconductor manufacturing systems. Th is model has been used for modeling and simulation of a real life elec tronic components manufacturing system. It provides an accurate and fa st simulation of this system.