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ITA
ENG
SPECIAL SECTION ON 1997 INTERNATIONAL WORKSHOP ON STATISTICAL METROLOGY
Authors
HOSACK HH
MASUDA H
Citation
Hh. Hosack et H. Masuda, SPECIAL SECTION ON 1997 INTERNATIONAL WORKSHOP ON STATISTICAL METROLOGY, IEEE transactions on semiconductor manufacturing, 11(4), 1998, pp. 525-526
Citations number
NO
Categorie Soggetti
Engineering, Eletrical & Electronic","Engineering, Manufacturing","Physics, Applied
Journal title
IEEE transactions on semiconductor manufacturing
→
ACNP
ISSN journal
08946507
Volume
11
Issue
4
Year of publication
1998
Pages
525 - 526
Database
ISI
SICI code
0894-6507(1998)11:4<525:SSO1IW>2.0.ZU;2-M