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ENG
SPECIAL ISSUE ON MICROELECTRONICS MANUFACTURING SCIENCE AND TECHNOLOGY
Authors
CHATTERJEE PK
MOZUMDER PK
Citation
Pk. Chatterjee et Pk. Mozumder, SPECIAL ISSUE ON MICROELECTRONICS MANUFACTURING SCIENCE AND TECHNOLOGY, IEEE transactions on semiconductor manufacturing, 7(2), 1994, pp. 106-106
Citations number
NO
Categorie Soggetti
Engineering, Eletrical & Electronic","Engineering, Manufacturing","Physics, Applied
Journal title
IEEE transactions on semiconductor manufacturing
→
ACNP
ISSN journal
08946507
Volume
7
Issue
2
Year of publication
1994
Pages
106 - 106
Database
ISI
SICI code
0894-6507(1994)7:2<106:SIOMMS>2.0.ZU;2-J