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Results: 3

Authors: GANETSOS T TSAMAKIS D PANKNIN D MAIR GLR TEICHERT J BISCHOFF L AIDINIS C
Citation: T. Ganetsos et al., SI1-XGEX STRUCTURES FABRICATED BY FOCUSED ION-BEAM IMPLANTATION, Journal de physique. IV, 8(P3), 1998, pp. 109-112

Authors: TSOUKALAS D NORMAND P AIDINIS C KAPETANAKIS E ARGITIS P
Citation: D. Tsoukalas et al., FABRICATION OF SI NANODEVICES BY OPTICAL LITHOGRAPHY AND ANISOTROPIC ETCHING, Microelectronic engineering, 42, 1998, pp. 523-526

Authors: NORMAND P TSOUKALAS D AIDINIS C TSEREPI A KOUVATSOS D KAPETANAKIS E
Citation: P. Normand et al., FABRICATION OF SI NANO-WIRES USING ANISOTROPIC DRY AND WET ETCHING, Microelectronic engineering, 42, 1998, pp. 551-554
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