Login
|
New Account
AAAAAA
ITA
ENG
Results:
1-3
|
Results: 3
SI1-XGEX STRUCTURES FABRICATED BY FOCUSED ION-BEAM IMPLANTATION
Authors:
GANETSOS T TSAMAKIS D PANKNIN D MAIR GLR TEICHERT J BISCHOFF L AIDINIS C
Citation:
T. Ganetsos et al., SI1-XGEX STRUCTURES FABRICATED BY FOCUSED ION-BEAM IMPLANTATION, Journal de physique. IV, 8(P3), 1998, pp. 109-112
FABRICATION OF SI NANODEVICES BY OPTICAL LITHOGRAPHY AND ANISOTROPIC ETCHING
Authors:
TSOUKALAS D NORMAND P AIDINIS C KAPETANAKIS E ARGITIS P
Citation:
D. Tsoukalas et al., FABRICATION OF SI NANODEVICES BY OPTICAL LITHOGRAPHY AND ANISOTROPIC ETCHING, Microelectronic engineering, 42, 1998, pp. 523-526
FABRICATION OF SI NANO-WIRES USING ANISOTROPIC DRY AND WET ETCHING
Authors:
NORMAND P TSOUKALAS D AIDINIS C TSEREPI A KOUVATSOS D KAPETANAKIS E
Citation:
P. Normand et al., FABRICATION OF SI NANO-WIRES USING ANISOTROPIC DRY AND WET ETCHING, Microelectronic engineering, 42, 1998, pp. 551-554
Risultati:
1-3
|