Authors:
MAEGAWA S
IPPOSHI T
MAEDA S
NISHIMURA H
ICHIKI T
ASHIDA M
TANINA O
INOUE Y
NISHIMURA T
TSUBOUCHI N
Citation: S. Maegawa et al., PERFORMANCE AND RELIABILITY IMPROVEMENTS IN POLY-SI TFTS BY FLUORINE IMPLANTATION INTO GATE POLY-SI, I.E.E.E. transactions on electron devices, 42(6), 1995, pp. 1106-1112