Authors:
LI XY
DIVAKARUNI R
HSU JT
PRABHAKAR V
AUM P
CHAN D
VISWANATHAN CR
Citation: Xy. Li et al., EFFECT OF PLASMA POLY-ETCH ON EFFECTIVE CHANNEL-LENGTH AND HOT-CARRIER RELIABILITY IN SUBMICRON TRANSISTORS, IEEE electron device letters, 15(4), 1994, pp. 140-141
Authors:
GU T
OKANDAN M
AWADELKARIM OO
FONASH SJ
REMBETSKI JF
AUM P
CHAN YD
Citation: T. Gu et al., IMPACT OF POLYSILICON DRY-ETCHING ON 0.5-MU-M NMOS TRANSISTOR PERFORMANCE - THE PRESENCE OF BOTH PLASMA BOMBARDMENT DAMAGE AND PLASMA CHARGING DAMAGE, IEEE electron device letters, 15(2), 1994, pp. 48-50