Authors: BORZENKO TB KOVAL YI KULIK LV LARIONOV AV

Citation: Tb. Borzenko et al., A NEW APPROACH TO THE CAP LAYER THINNING OF GAAS BASED HETEROSTRUCTURES WITH NEAR-SURFACE QUANTUM-WELLS, Microelectronic engineering, 35(1-4), 1997, pp. 83-86

Authors: BORZENKO TB KOVAL YI KULIK LV LARIONOV AV

Citation: Tb. Borzenko et al., ION-BEAM ETCHING OF GAAS - INFLUENCE OF ETCHING PARAMETERS ON THE DEGREE OF RADIATION-DAMAGE, Applied physics letters, 70(17), 1997, pp. 2297-2299

Authors: KUDRYASHOV VA BORZENKO TB KRASNOV VV ARISTOV VV

Citation: Va. Kudryashov et al., NEW MICROLITHOGRAPHY TECHNOLOGIES BASED ON RESIST IRRADIATION BY LOW-ENERGY ELECTRONS, Microelectronic engineering, 23(1-4), 1994, pp. 307-310

Authors: BORZENKO TB KOVAL YI KUDRYASHOV VA

Citation: Tb. Borzenko et al., ION-BEAM ETCHING MECHANISM OF PMMA BASED RESISTS BY NOBLE-GAS IONS, Microelectronic engineering, 23(1-4), 1994, pp. 337-340