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Results: 1-9 |
Results: 9
FABRICATION OF A GRAY-TONE MASK AND PATTERN TRANSFER IN THICK PHOTORESISTS
Authors: NICOLAS S DUFOURGERGAM E BOSSEBOEUF A BOUROUINA T GILLES JP GRANDCHAMP JP
Citation: S. Nicolas et al., FABRICATION OF A GRAY-TONE MASK AND PATTERN TRANSFER IN THICK PHOTORESISTS, Journal of micromechanics and microengineering, 8(2), 1998, pp. 95-98
FABRICATION AND CHARACTERIZATION OF ELECTROSTATICALLY DRIVEN SILICON MICROBEAMS
Authors: ATTIA P BOUTRY M BOSSEBOEUF A HESTO P
Citation: P. Attia et al., FABRICATION AND CHARACTERIZATION OF ELECTROSTATICALLY DRIVEN SILICON MICROBEAMS, Microelectronics, 29(9), 1998, pp. 641-644
CHARACTERIZATION OF W FILMS ON SI AND SIO2 SI SUBSTRATES BY X-RAY-DIFFRACTION, AFM AND BLISTER TEST ADHESION MEASUREMENTS/
Authors: BOSSEBOEUF A DUPEUX M BOUTRY M BOUROUINA T BOUCHIER D DEBARRE D
Citation: A. Bosseboeuf et al., CHARACTERIZATION OF W FILMS ON SI AND SIO2 SI SUBSTRATES BY X-RAY-DIFFRACTION, AFM AND BLISTER TEST ADHESION MEASUREMENTS/, Microscopy microanalysis microstructures, 8(4-5), 1997, pp. 261-272
ACCURACY OF THIN-FILM STRESS MEASUREMENTS WITH C-SI MICROBEAMS FABRICATED BY DRY-ETCHING
Authors: BOUTRY M BOSSEBOEUF A BOUROUINA T GRANDCHAMP JP DUFOURGERGAM E GILLES JP
Citation: M. Boutry et al., ACCURACY OF THIN-FILM STRESS MEASUREMENTS WITH C-SI MICROBEAMS FABRICATED BY DRY-ETCHING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(5), 1997, pp. 1767-1772
FINITE-ELEMENT METHOD ANALYSIS OF FREESTANDING MICRORINGS FOR THIN-FILM TENSILE STRAIN-MEASUREMENTS
Authors: BOUTRY M BOSSEBOEUF A GRANDCHAMP JP COFFIGNAL G
Citation: M. Boutry et al., FINITE-ELEMENT METHOD ANALYSIS OF FREESTANDING MICRORINGS FOR THIN-FILM TENSILE STRAIN-MEASUREMENTS, Journal of micromechanics and microengineering, 7(4), 1997, pp. 280-284
DESIGN AND SIMULATION OF AN ELECTROSTATIC MICROPUMP FOR DRUG-DELIVERYAPPLICATIONS
Authors: BOUROUINA T BOSSEBOEUF A GRANDCHAMP JP
Citation: T. Bourouina et al., DESIGN AND SIMULATION OF AN ELECTROSTATIC MICROPUMP FOR DRUG-DELIVERYAPPLICATIONS, Journal of micromechanics and microengineering, 7(3), 1997, pp. 186-188
PLANARIZATION OF ROUGH SILICON SURFACES BY LASER ANNEALING
Authors: BOSSEBOEUF A BOULMER J DEBARRE D
Citation: A. Bosseboeuf et al., PLANARIZATION OF ROUGH SILICON SURFACES BY LASER ANNEALING, Applied surface science, 110, 1997, pp. 473-476
IMPROVEMENT OF A CLASSICAL ELECTRODEPOSITION PROCESS FOR ELECTROSTATIC VARIABLE-CAPACITANCE, SIDE-DRIVE MICROMOTOR FABRICATION
Authors: SURBLED P DUFOURGERGAM E BOSSEBOEUF A GILLES JP GRANDCHAMP JP
Citation: P. Surbled et al., IMPROVEMENT OF A CLASSICAL ELECTRODEPOSITION PROCESS FOR ELECTROSTATIC VARIABLE-CAPACITANCE, SIDE-DRIVE MICROMOTOR FABRICATION, Journal of micromechanics and microengineering, 6(1), 1996, pp. 42-45
NITRIDATION KINETICS OF TUNGSTEN FILMS AT LOW-TEMPERATURE WITH REACTIVE NEUTRALS GENERATED FROM A N-2 MULTIPOLAR DISCHARGE
Authors: BOSSEBOEUF A KIANFAR S MEYER F
Citation: A. Bosseboeuf et al., NITRIDATION KINETICS OF TUNGSTEN FILMS AT LOW-TEMPERATURE WITH REACTIVE NEUTRALS GENERATED FROM A N-2 MULTIPOLAR DISCHARGE, Applied surface science, 73, 1993, pp. 310-315
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