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Results: 1-25/31
Authors:
SMITH HB
CHARLES C
BOSWELL RW
KUWAHARA H
Citation: Hb. Smith et al., PULSING A LOW-PRESSURE RADIOFREQUENCY DISCHARGE, JSME international journal. Series B, fluids and thermal engineering, 41(2), 1998, pp. 424-428
Authors:
BORG GG
BOSWELL RW
Citation: Gg. Borg et Rw. Boswell, POWER COUPLING TO HELICON AND TRIVELPIECE-GOULD MODES IN HELICON SOURCES, Physics of plasmas, 5(3), 1998, pp. 564-571
Authors:
CONWAY GD
PERRY AJ
BOSWELL RW
Citation: Gd. Conway et al., EVOLUTION OF ION AND ELECTRON-ENERGY DISTRIBUTIONS IN PULSED HELICON PLASMA DISCHARGES, Plasma sources science & technology, 7(3), 1998, pp. 337-347
Authors:
CHABERT P
BOSWELL RW
DAVIS C
Citation: P. Chabert et al., INVESTIGATION OF A SF6 HELICON PLASMA, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(1), 1998, pp. 78-86
Authors:
CHARLES C
BOSWELL RW
Citation: C. Charles et Rw. Boswell, STRESS REDUCTION IN SILICON DIOXIDE LAYERS BY PULSING AN OXYGEN SILANE HELICON DIFFUSION PLASMA/, Journal of applied physics, 84(1), 1998, pp. 350-354
Authors:
DEGELING AW
BOSWELL RW
Citation: Aw. Degeling et Rw. Boswell, MODELING IONIZATION BY HELICON WAVES, Physics of plasmas, 4(7), 1997, pp. 2748-2755
Authors:
SHATS MG
RUDAKOV DL
BOSWELL RW
BORG GG
Citation: Mg. Shats et al., ION TEMPERATURE AND PLASMA FLOWS IN IMPROVED CONFINEMENT MODE IN THE H-1 HELIAC, Physics of plasmas, 4(10), 1997, pp. 3629-3634
Authors:
PEIGNON MC
TURBAN G
CHARLES C
BOSWELL RW
Citation: Mc. Peignon et al., SURFACE MODELING OF REACTIVE ION ETCHING OF SILICON-GERMANIUM ALLOYS IN A SF6 PLASMA, Surface & coatings technology, 97(1-3), 1997, pp. 465-468
Authors:
BOSWELL RW
CHEN FF
Citation: Rw. Boswell et Ff. Chen, HELICONS - THE EARLY YEARS, IEEE transactions on plasma science, 25(6), 1997, pp. 1229-1244
Authors:
CHEN FF
BOSWELL RW
Citation: Ff. Chen et Rw. Boswell, HELICONS - THE PAST DECADE, IEEE transactions on plasma science, 25(6), 1997, pp. 1245-1257
Authors:
BOOTH JP
CUNGE G
SADEGHI N
BOSWELL RW
Citation: Jp. Booth et al., THE TRANSITION FROM SYMMETRICAL TO ASYMMETRIC DISCHARGES IN PULSED 13.56-MHZ CAPACITIVELY COUPLED PLASMAS, Journal of applied physics, 82(2), 1997, pp. 552-560
Authors:
SMITH HB
CHARLES C
BOSWELL RW
KUWAHARA H
Citation: Hb. Smith et al., BIAS FORMATION IN A PULSED RADIOFREQUENCY ARGON DISCHARGE, Journal of applied physics, 82(2), 1997, pp. 561-565
Authors:
CHARLES C
BOSWELL RW
Citation: C. Charles et Rw. Boswell, ION CONTRIBUTION TO THE DEPOSITION OF SILICON DIOXIDE IN OXYGEN SILANE HELICON DIFFUSION PLASMAS/, Journal of applied physics, 81(1), 1997, pp. 43-49
Authors:
DURANDET A
DAVIS CA
BOSWELL RW
Citation: A. Durandet et al., PURE SILICON PLASMA IN A HELICON PLASMA DEPOSITION SYSTEM, Applied physics letters, 70(14), 1997, pp. 1814-1816
Authors:
DEGELING AW
JUNG CO
BOSWELL RW
ELLINGBOE AR
Citation: Aw. Degeling et al., PLASMA PRODUCTION FROM HELICON WAVES, Physics of plasmas, 3(7), 1996, pp. 2788-2796
Authors:
ELLINGBOE AR
BOSWELL RW
Citation: Ar. Ellingboe et Rw. Boswell, CAPACITIVE, INDUCTIVE AND HELICON-WAVE MODES OF OPERATION OF A HELICON PLASMA SOURCE, Physics of plasmas, 3(7), 1996, pp. 2797-2804
Authors:
PEIGNON MC
CARDINAUD C
TURBAN G
CHARLES C
BOSWELL RW
Citation: Mc. Peignon et al., X-RAY PHOTOELECTRON STUDY OF THE REACTIVE ION ETCHING OF SIXGE1-X ALLOYS IN SF6 PLASMAS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 14(1), 1996, pp. 156-164
Authors:
MCKENZIE DR
MCFALL WD
SAINTY WG
YIN Y
DURANDET A
BOSWELL RW
Citation: Dr. Mckenzie et al., NEW TECHNOLOGY FOR PACVD, Surface & coatings technology, 82(3), 1996, pp. 326-333
Authors:
MCKENZIE DR
MCFALL WD
REISCH S
JAMES BW
FALCONER IS
BOSWELL RW
PERSING H
PERRY AJ
DURANDET A
Citation: Dr. Mckenzie et al., SYNTHESIS OF CUBIC BORON-NITRIDE THIN-FILMS, Surface & coatings technology, 78(1-3), 1996, pp. 255-262
Authors:
VENDER D
SMITH HB
BOSWELL RW
Citation: D. Vender et al., SIMULATIONS OF MULTIPACTOR-ASSISTED BREAKDOWN IN RADIO-FREQUENCY PLASMAS, Journal of applied physics, 80(8), 1996, pp. 4292-4298
Authors:
BELTRAMI DR
LOVE JD
DURANDET A
SAMOC A
SAMOC M
LUTHERDAVIES B
BOSWELL RW
Citation: Dr. Beltrami et al., PLANAR GRADED-INDEX (GRIN) PECVD LENS, Electronics Letters, 32(6), 1996, pp. 549-550
Authors:
JARVIS RA
LOVE JD
DURANDET A
CONWAY GD
BOSWELL RW
Citation: Ra. Jarvis et al., UV-INDUCED INDEX CHANGE IN HYDROGEN-FREE GERMANE-SILICATE WAVE-GUIDES, Electronics Letters, 32(6), 1996, pp. 550-552
Authors:
ELLINGBOE AR
BOSWELL RW
BOOTH JP
SADEGHI N
Citation: Ar. Ellingboe et al., ELECTRON-BEAM PULSES PRODUCED BY HELICON-WAVE EXCITATION, Physics of plasmas, 2(6), 1995, pp. 1807-1809
Authors:
BOSWELL RW
VENDER D
Citation: Rw. Boswell et D. Vender, AN EXPERIMENTAL-STUDY OF BREAKDOWN IN A PULSED HELICON PLASMA, Plasma sources science & technology, 4(4), 1995, pp. 534-540
Authors:
CHARLES C
BOSWELL RW
Citation: C. Charles et Rw. Boswell, EFFECT OF WALL CHARGING ON AN OXYGEN PLASMA CREATED IN A HELICON DIFFUSION REACTOR USED FOR SILICA DEPOSITION, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(4), 1995, pp. 2067-2073