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Results: 1-10 |
Results: 10
A SPATIALLY-RESOLVED OPTICAL-EMISSION SENSOR FOR PLASMA ETCH MONITORING
Authors: SHANNON S HOLLOWAY JP FLIPPO K BRAKE ML
Citation: S. Shannon et al., A SPATIALLY-RESOLVED OPTICAL-EMISSION SENSOR FOR PLASMA ETCH MONITORING, Applied physics letters, 71(11), 1997, pp. 1467-1468
2-DIMENSIONAL IMAGING OF OPTICAL-EMISSION IN A MULTICUSP-ECR MICROWAVE RESONANT-CAVITY
Authors: BROOKS CB BRAKE ML
Citation: Cb. Brooks et Ml. Brake, 2-DIMENSIONAL IMAGING OF OPTICAL-EMISSION IN A MULTICUSP-ECR MICROWAVE RESONANT-CAVITY, IEEE transactions on plasma science, 24(1), 1996, pp. 8-9
IN-SITU SENSOR OF SPATIALLY-RESOLVED OPTICAL-EMISSION
Authors: BUIE MJ PENDER JTP HOLLOWAY JP BRAKE ML
Citation: Mj. Buie et al., IN-SITU SENSOR OF SPATIALLY-RESOLVED OPTICAL-EMISSION, IEEE transactions on plasma science, 24(1), 1996, pp. 111-112
ABELS INVERSION APPLIED TO EXPERIMENTAL SPECTROSCOPIC DATA WITH OFF-AXIS PEAKS
Authors: BUIE MJ PENDER JTP HOLLOWAY JP VINCENT T VENTZEK PLG BRAKE ML
Citation: Mj. Buie et al., ABELS INVERSION APPLIED TO EXPERIMENTAL SPECTROSCOPIC DATA WITH OFF-AXIS PEAKS, Journal of quantitative spectroscopy & radiative transfer, 55(2), 1996, pp. 231-243
REACTIVE ION ETCHING IN THE GASEOUS ELECTRONICS CONFERENCE RF REFERENCE CELL
Authors: BRAKE ML PENDER JTP BUIE MJ RICCI A SONIKER J
Citation: Ml. Brake et al., REACTIVE ION ETCHING IN THE GASEOUS ELECTRONICS CONFERENCE RF REFERENCE CELL, Journal of research of the National Institute of Standards and Technology, 100(4), 1995, pp. 441-448
IN-SITU DIAGNOSTIC FOR ETCH UNIFORMITY
Authors: BUIE MJ PENDER JT SONIKER J BRAKE ML ELTA M
Citation: Mj. Buie et al., IN-SITU DIAGNOSTIC FOR ETCH UNIFORMITY, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(4), 1995, pp. 1930-1934
LITHIUM-ARGON DISCHARGES IN A MULTICUSP-ECR MICROWAVE RESONANT-CAVITY
Authors: BROOKS CB BRAKE ML
Citation: Cb. Brooks et Ml. Brake, LITHIUM-ARGON DISCHARGES IN A MULTICUSP-ECR MICROWAVE RESONANT-CAVITY, IEEE transactions on plasma science, 23(6), 1995, pp. 1023-1025
THE GASEOUS ELECTRONICS CONFERENCE RADIOFREQUENCY REFERENCE CELL - A DEFINED PARALLEL-PLATE RADIOFREQUENCY SYSTEM FOR EXPERIMENTAL AND THEORETICAL-STUDIES OF PLASMA-PROCESSING DISCHARGES
Authors: HARGIS PJ GREENBERG KE MILLER PA GERARDO JB TORCZYNSKI JR RILEY ME HEBNER GA ROBERTS JR OLTHOFF JK WHETSTONE JR VANBRUNT RJ SOBOLEWSKI MA ANDERSON HM SPLICHAL MP MOCK JL BLETZINGER P GARSCADDEN A GOTTSCHO RA SELWYN G DALVIE M HEIDENREICH JE BUTTERBAUGH JW BRAKE ML PASSOW ML PENDER J LUJAN A ELTA ME GRAVES DB SAWIN HH KUSHNER MJ VERDEYEN JT HORWATH R TURNER TR
Citation: Pj. Hargis et al., THE GASEOUS ELECTRONICS CONFERENCE RADIOFREQUENCY REFERENCE CELL - A DEFINED PARALLEL-PLATE RADIOFREQUENCY SYSTEM FOR EXPERIMENTAL AND THEORETICAL-STUDIES OF PLASMA-PROCESSING DISCHARGES, Review of scientific instruments, 65(1), 1994, pp. 140-154
ELECTRON-DENSITY AND COLLISION FREQUENCY OF MICROWAVE-RESONANT-CAVITY-PRODUCED DISCHARGES
Authors: MCCOLL W BROOKS C BRAKE ML
Citation: W. Mccoll et al., ELECTRON-DENSITY AND COLLISION FREQUENCY OF MICROWAVE-RESONANT-CAVITY-PRODUCED DISCHARGES, Journal of applied physics, 74(6), 1993, pp. 3724-3735
RADIAL OPTICAL-EMISSION PROFILES OF RADIO-FREQUENCY GLOW-DISCHARGES
Authors: PENDER J BUIE M VINCENT T HOLLOWAY J ELTA M BRAKE ML
Citation: J. Pender et al., RADIAL OPTICAL-EMISSION PROFILES OF RADIO-FREQUENCY GLOW-DISCHARGES, Journal of applied physics, 74(5), 1993, pp. 3590-3592
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