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Results:
1-13
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Results: 13
Authors:
HATAKEYAMA R
HERSHKOWITZ N
MAJESKI R
WEN YJ
BROUCHOUS DB
PROBERTS P
BREUN RA
ROBERTS D
VUKOVIC M
TANAKA T
Citation: R. Hatakeyama et al., MEASUREMENTS ON ROTATING ION-CYCLOTRON RANGE OF FREQUENCIES INDUCED PARTICLE FLUXES IN AXISYMMETRICAL MIRROR PLASMAS, Physics of plasmas, 4(8), 1997, pp. 2947-2954
Authors:
HERSHKOWITZ N
BREUN RA
Citation: N. Hershkowitz et Ra. Breun, DIAGNOSTICS FOR PLASMA PROCESSING (ETCHING PLASMAS) (INVITED), Review of scientific instruments, 68(1), 1997, pp. 880-885
Authors:
KIRMSE KHR
WENDT AE
DISCH SB
WU JZ
ABRAHAM IC
MEYER JA
BREUN RA
WOODS RC
Citation: Khr. Kirmse et al., SIO2 TO SI SELECTIVITY MECHANISMS IN HIGH-DENSITY FLUOROCARBON PLASMA-ETCHING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(2), 1996, pp. 710-715
Authors:
HERSHKOWITZ N
DING J
BREUN RA
CHEN RTS
MEYER J
QUICK AK
Citation: N. Hershkowitz et al., DOES HIGH-DENSITY LOW-PRESSURE ETCHING DEPEND ON THE TYPE OF PLASMA SOURCE, Physics of plasmas, 3(5), 1996, pp. 2197-2202
Authors:
INTRATOR T
PROBERT PH
VUKOVIC M
WUKITCH S
ELFIMOV A
DURST R
BREUN RA
BROUCHOUS D
DIEBOLD D
DOCZY M
FONCK R
HERSHKOWITZ N
KISHINEVSKY M
LITWIN C
MAJESKI R
NONN P
WINZ G
Citation: T. Intrator et al., ALFVEN ION-ION HYBRID WAVE HEATING IN THE PHAEDRUS-T TOKAMAK, Physics of plasmas, 3(4), 1996, pp. 1331-1339
Authors:
GOECKNER MJ
FETHERSTON RP
HITCHON WNG
HORSWILL NC
KEITER ER
SHAMIM MM
BREUN RA
CONRAD JR
SHERIDAN TE
Citation: Mj. Goeckner et al., DYNAMICS OF COLLISIONAL PULSED PLANAR SHEATHS, Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics, 51(4), 1995, pp. 3760-3763
Authors:
CHEN RTS
BREUN RA
GROSS S
HERSHKOWITZ N
HSIEH MKJ
JACOBS J
Citation: Rts. Chen et al., EXPERIMENTAL STUDIES OF MULTIMODE HELICON PLASMA-WAVES, Plasma sources science & technology, 4(3), 1995, pp. 337-344
Authors:
BROWN RD
GILLAND JH
HERSHKOWITZ N
BREUN RA
Citation: Rd. Brown et al., PONDEROMOTIVE EFFECTS IN HELICON PLASMAS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 865-870
Authors:
GOECKNER MJ
MALIK SM
CONRAD JR
BREUN RA
Citation: Mj. Goeckner et al., LASER-INDUCED FLUORESCENCE MEASUREMENT OF THE DYNAMICS OF A PULSED PLANAR SHEATH, Physics of plasmas, 1(4), 1994, pp. 1064-1074
Authors:
GOECKNER MJ
HENDERSON MA
MEYER JA
BREUN RA
Citation: Mj. Goeckner et al., FOURIER-TRANSFORM INFRARED-ABSORPTION SPECTROMETRY MEASUREMENTS OF A CF4 DISCHARGE IN AN ELECTRON-CYCLOTRON-RESONANCE REACTOR, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(6), 1994, pp. 3120-3125
Authors:
GOECKNER MJ
MEYER JA
KIM GH
JENQ JS
MATTHEWS A
TAYLOR JW
BREUN RA
Citation: Mj. Goeckner et al., ROLE OF CONTAMINANTS IN ELECTRON-CYCLOTRON-RESONANCE PLASMAS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 11(5), 1993, pp. 2543-2552
Authors:
GOECKNER MJ
BREUN RA
Citation: Mj. Goeckner et Ra. Breun, USING FOURIER-TRANSFORM INFRARED-ABSORPTION SPECTROMETRY TO PROBE THEINJECTED NEUTRAL GAS IN A PLASMA HAVING A HIGH IONIZATION FRACTION, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 11(3), 1993, pp. 689-693
Authors:
TANG BY
FETHERSTON RP
SHAMIM M
BREUN RA
CHEN A
CONRAD JR
Citation: By. Tang et al., MEASUREMENT OF ION SPECIES RATIO IN THE PLASMA SOURCE ION-IMPLANTATION PROCESS, Journal of applied physics, 73(9), 1993, pp. 4176-4180
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