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Citation: Mj. Goeckner et Ra. Breun, USING FOURIER-TRANSFORM INFRARED-ABSORPTION SPECTROMETRY TO PROBE THEINJECTED NEUTRAL GAS IN A PLASMA HAVING A HIGH IONIZATION FRACTION, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 11(3), 1993, pp. 689-693
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FETHERSTON RP
SHAMIM M
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