Authors:
POPOV OA
SHAPOVAL SY
YODER MD
CHUMAKOV AA
Citation: Oa. Popov et al., ELECTRON-CYCLOTRON-RESONANCE PLASMA SOURCE FOR METALORGANIC CHEMICAL-VAPOR-DEPOSITION OF SILICON-OXIDE FILMS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(2), 1994, pp. 300-307
Authors:
ANTIPOV AV
BRITVICH GI
VASILCHENKO VG
CHUMAKOV AA
Citation: Av. Antipov et al., PRECISE DENSITOMETER FOR THIN-FILM DOSIMETERS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 94(3), 1994, pp. 338-340
Authors:
ANTIPOV AV
BRITVICH GI
VASILCHENKO VG
CHUMAKOV AA
BUCHINSKAYA II
ZHMUROVA ZI
KRIVANDINA EA
SOBOLEV BP
DEVITSIN EG
KOZLOV VA
KRECHKO YA
MOTIN YD
Citation: Av. Antipov et al., INVESTIGATION OF NEW INORGANIC MATERIALS FOR HOMOGENEOUS ELECTROMAGNETIC CALORIMETERS, Instruments and experimental techniques, 36(3), 1993, pp. 371-378