AAAAAA

   
Results: 1-7 |
Results: 7
PLASMA DEPOSITION CHEMISTRY OF AMORPHOUS SILICON-CARBON ALLOYS FROM FLUORINATED GAS
Authors: CICALA G BRUNO G CAPEZZUTO P
Citation: G. Cicala et al., PLASMA DEPOSITION CHEMISTRY OF AMORPHOUS SILICON-CARBON ALLOYS FROM FLUORINATED GAS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(5), 1998, pp. 2762-2767
PHOTOELECTRON-SPECTROSCOPY STUDY OF AMORPHOUS SILICON-CARBON ALLOYS DEPOSITED BY PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION
Authors: CICALA G BRUNO G CAPEZZUTO P FAVIA P
Citation: G. Cicala et al., PHOTOELECTRON-SPECTROSCOPY STUDY OF AMORPHOUS SILICON-CARBON ALLOYS DEPOSITED BY PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION, Journal of materials research, 11(12), 1996, pp. 3017-3023
PLASMA DEPOSITION OF AMORPHOUS-SILICON ALLOYS FROM FLUORINATED GASES
Authors: CICALA G BRUNO G CAPEZZUTO P
Citation: G. Cicala et al., PLASMA DEPOSITION OF AMORPHOUS-SILICON ALLOYS FROM FLUORINATED GASES, Pure and applied chemistry, 68(5), 1996, pp. 1143-1149
PLASMA DEPOSITION AND CHARACTERIZATION OF PHOTOLUMINESCENT FLUORINATED NANOCRYSTALLINE SILICON FILMS
Authors: CICALA G CAPEZZUTO P BRUNO G SCHIAVULLI L PERNA G CAPOZZI V
Citation: G. Cicala et al., PLASMA DEPOSITION AND CHARACTERIZATION OF PHOTOLUMINESCENT FLUORINATED NANOCRYSTALLINE SILICON FILMS, Journal of applied physics, 80(11), 1996, pp. 6564-6566
PLASMA DEPOSITION OF AMORPHOUS SIC-H,F ALLOYS FROM SIF4-CH4-H-2 MIXTURES UNDER MODULATED CONDITIONS
Authors: CICALA G CAPEZZUTO P BRUNO G SCHIAVULLI L AMATO G
Citation: G. Cicala et al., PLASMA DEPOSITION OF AMORPHOUS SIC-H,F ALLOYS FROM SIF4-CH4-H-2 MIXTURES UNDER MODULATED CONDITIONS, Journal of applied physics, 79(11), 1996, pp. 8856-8858
STUDY OF THE NF3 PLASMA CLEANING OF REACTORS FOR AMORPHOUS-SILICON DEPOSITION
Authors: BRUNO G CAPEZZUTO P CICALA G MANODORO P
Citation: G. Bruno et al., STUDY OF THE NF3 PLASMA CLEANING OF REACTORS FOR AMORPHOUS-SILICON DEPOSITION, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(3), 1994, pp. 690-698
SILICON DEPOSITION ON STAINLESS-STEEL SURFACES IN VIEW OF THE CONDITIONING OF FTU VACUUM CHAMBER
Authors: APICELLA ML CICALA G NERI A TRAVERSARI G
Citation: Ml. Apicella et al., SILICON DEPOSITION ON STAINLESS-STEEL SURFACES IN VIEW OF THE CONDITIONING OF FTU VACUUM CHAMBER, Journal of nuclear materials, 215, 1994, pp. 1541-1545
Risultati: 1-7 |