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Results:
1-7
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Results: 7
Authors:
COLLART EJH
WEEMERS K
GRAVESTEIJN DJ
VANBERKUM JGM
Citation: Ejh. Collart et al., CHARACTERIZATION OF LOW-ENERGY (100 EV 10 KEV) BORON ION-IMPLANTATION, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(1), 1998, pp. 280-285
Authors:
VANBERKUM JGM
COLLART EJH
WEEMERS K
GRAVESTEIJN DJ
ILTGEN K
BENNINGHOVEN A
NIEHUIS E
Citation: Jgm. Vanberkum et al., SECONDARY-ION MASS-SPECTROMETRY DEPTH PROFILING OF ULTRALOW-ENERGY ION IMPLANTS - PROBLEMS AND SOLUTIONS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 16(1), 1998, pp. 298-301
Authors:
COLLART EJH
WEEMERS K
COWERN NEB
POLITIEK J
BANCKEN PHL
VANBERKUM JGM
GRAVESTEIJN DJ
Citation: Ejh. Collart et al., LOW-ENERGY BORON IMPLANTATION IN SILICON AND ROOM-TEMPERATURE DIFFUSION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 139(1-4), 1998, pp. 98-107
Authors:
COLLART EJH
GRAVESTEIJN DJ
LATHOUWERS EGC
KERSTEN WJ
Citation: Ejh. Collart et al., ARSENIC DOPING IN SI-MBE USING LOW-ENERGY ION-IMPLANTATION (LEII), Journal of crystal growth, 157(1-4), 1995, pp. 349-352
ON THE ROLE OF ATOMIC OXYGEN IN THE ETCHING OF ORGANIC POLYMERS IN A RADIOFREQUENCY OXYGEN DISCHARGE
Authors:
COLLART EJH
BAGGERMAN JAG
VISSER RJ
Citation: Ejh. Collart et al., ON THE ROLE OF ATOMIC OXYGEN IN THE ETCHING OF ORGANIC POLYMERS IN A RADIOFREQUENCY OXYGEN DISCHARGE, Journal of applied physics, 78(1), 1995, pp. 47-54
Authors:
BAGGERMAN JAG
VISSER RJ
COLLART EJH
Citation: Jag. Baggerman et al., POWER DISSIPATION MEASUREMENTS IN A LOW-PRESSURE N(2) RADIOFREQUENCY DISCHARGE, Journal of applied physics, 76(2), 1994, pp. 738-746
Authors:
BAGGERMAN JAG
VISSER RJ
COLLART EJH
Citation: Jag. Baggerman et al., ION-INDUCED ETCHING OF ORGANIC POLYMERS IN ARGON AND OXYGEN RADIOFREQUENCY PLASMAS, Journal of applied physics, 75(2), 1994, pp. 758-769
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