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Results:
1-7
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Results: 7
Authors:
COZMA A
JAKOBSEN H
PUERS R
Citation: A. Cozma et al., ELECTRICAL CHARACTERIZATION OF ANODICALLY BONDED WAFERS, Journal of micromechanics and microengineering, 8(2), 1998, pp. 69-73
Authors:
PUERS R
COZMA A
DEBRUYKER D
Citation: R. Puers et al., ON THE MECHANISMS IN THERMALLY ACTUATED COMPOSITE DIAPHRAGMS, Sensors and actuators. A, Physical, 67(1-3), 1998, pp. 13-17
Authors:
DEBRUYKER D
COZMA A
PUERS R
Citation: D. Debruyker et al., A COMBINED PIEZORESISTIVE CAPACITIVE PRESSURE SENSOR WITH SELF-TEST FUNCTION-BASED ON THERMAL ACTUATION/, Sensors and actuators. A, Physical, 66(1-3), 1998, pp. 70-75
Authors:
PUERS R
COZMA A
Citation: R. Puers et A. Cozma, BONDING WAFERS WITH SODIUM-SILICATE SOLUTION, Journal of micromechanics and microengineering, 7(3), 1997, pp. 114-117
Authors:
COZMA A
PUERS R
Citation: A. Cozma et R. Puers, ELECTROSTATIC ACTUATION AS A SELF-TESTING METHOD FOR SILICON PRESSURESENSORS, Sensors and actuators. A, Physical, 60(1-3), 1997, pp. 32-36
Authors:
PUERS R
DEBRUYKER D
COZMA A
Citation: R. Puers et al., A NOVEL COMBINED REDUNDANT PRESSURE SENSOR WITH SELF-TEST FUNCTION, Sensors and actuators. A, Physical, 60(1-3), 1997, pp. 68-71
Authors:
COZMA A
PUERS B
Citation: A. Cozma et B. Puers, CHARACTERIZATION OF THE ELECTROSTATIC BONDING OF SILICON AND PYREX GLASS, Journal of micromechanics and microengineering, 5(2), 1995, pp. 98-102
Risultati:
1-7
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