Authors:
Goyette, AN
de Urquijo, J
Wang, YC
Christophorou, LG
Olthoff, JK
Citation: An. Goyette et al., Electron transport, ionization, and attachment coefficients in C2F4 and C2F4/Ar mixtures, J CHEM PHYS, 114(20), 2001, pp. 8932-8937
Citation: Lg. Christophorou et Jk. Olthoff, Electron interactions with plasma processing gases: An update for CF4, CHF3, C2F6, and C3F8, J PHYS CH R, 28(4), 1999, pp. 967-982
Authors:
Bordage, MC
Segur, P
Christophorou, LG
Olthoff, JK
Citation: Mc. Bordage et al., Boltzmann analysis of electron swarm parameters in CF4 using independentlyassessed electron-collision cross sections, J APPL PHYS, 86(7), 1999, pp. 3558-3566