Authors:
SAINTETIENNE E
PONS P
BLASQUEZ G
TEMPLE P
CONEDERA V
DILHAN M
CHAUFFLEUR X
MENINI P
PLANA R
PARRA T
GUILLON B
LALAURIE JC
Citation: E. Saintetienne et al., A DEDICATED MICROMACHINING TECHNOLOGY FOR HIGH-ASPECT-RATIO MILLIMETER-WAVE CIRCUITS, Sensors and actuators. A, Physical, 68(1-3), 1998, pp. 435-441
Citation: V. Conedera et al., A SIMPLE OPTICAL-SYSTEM TO OPTIMIZE A HIGH DEPTH TO WIDTH ASPECT RATIO APPLIED TO A POSITIVE PHOTORESIST LITHOGRAPHY PROCESS, Journal of micromechanics and microengineering, 7(3), 1997, pp. 118-120