Citation: Ac. Dillon et al., ADSORPTION AND DECOMPOSITION OF TRICHLOROSILANE AND TRICHLOROGERMANE ON POROUS SILICON AND SI(100)2X1 SURFACES, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(1), 1995, pp. 1-10
Citation: Mb. Robinson et al., ADSORPTION AND DECOMPOSITION OF DICHLOROSILANE ON POROUS SILICON SURFACES, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(1), 1995, pp. 35-41
Citation: Mh. Hassan et al., SINGLE-COMPONENT AND MIXED-GAS TRANSPORT IN A SILICA HOLLOW-FIBER MEMBRANE, Journal of membrane science, 104(1-2), 1995, pp. 27-42
Citation: Ac. Dillon et al., SURFACE-CHEMISTRY OF AL2O3 DEPOSITION USING AL(CH3)(3) AND H2O IN A BINARY REACTION SEQUENCE, Surface science, 322(1-3), 1995, pp. 230-242
Authors:
GEORGE SM
SNEH O
DILLON AC
WISE ML
OTT AW
OKADA LA
WAY JD
Citation: Sm. George et al., ATOMIC LAYER CONTROLLED DEPOSITION OF SIO2 AND AL2O3 USING ABAB - BINARY REACTION SEQUENCE CHEMISTRY, Applied surface science, 82-3, 1994, pp. 460-467
Citation: Ac. Dillon et al., DECOMPOSITION OF SILICON HYDRIDES FOLLOWING DISILANE ADSORPTION ON POROUS SILICON SURFACES, Surface science, 295(1-2), 1993, pp. 120000998-120001004