Citation: Gg. Gartvich et al., SPACE-TIME CHARACTERISTICS OF A SUPERSONIC-JET FLOW FORMED WITH A PULSED ELECTROMAGNETIC VALVE, Instruments and experimental techniques, 40(2), 1997, pp. 271-273
Authors:
GUHARAY SK
WANG W
DUDNIKOV VG
REISER M
ORLOFF J
MELNGAILIS J
Citation: Sk. Guharay et al., HIGH-BRIGHTNESS ION-SOURCE FOR ION PROJECTION LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 3907-3910
Authors:
DUDNIKOV VG
DEREVYANKIN GE
KOVALEVSKY DV
SAVKIN VY
SOKOLOVSKY EA
GUHARAY SK
Citation: Vg. Dudnikov et al., SURFACE PLASMA SOURCE TO GENERATE HIGH-BRIGHTNESS H- BEAMS FOR ION PROJECTION LITHOGRAPHY, Review of scientific instruments, 67(4), 1996, pp. 1614-1617
Authors:
DUDNIKOV VG
DEREVYANKIN GE
KOVALEVSKY DV
SAVKIN VY
SOKOLOVSKY EA
GUHARAY SK
Citation: Vg. Dudnikov et al., SURFACE PLASMA SOURCE TO GENERATE HIGH-BRIGHTNESS H- BEAMS FOR ION PROJECTION LITHOGRAPHY, Review of scientific instruments, 67(3), 1996, pp. 927-927
Authors:
BELOV AS
ESIN SK
NETCHAEVA LP
PLOKHINSKI YV
VASILEV GA
KLENOV VS
TURBABIN AV
YAKUSHEV VP
DUDNIKOV VG
Citation: As. Belov et al., HIGH-INTENSITY SOURCE OF POLARIZED NEGATIVE HYDROGEN-IONS WITH A RESONANT CHARGE-EXCHANGE PLASMA IONIZER, Review of scientific instruments, 67(3), 1996, pp. 1293-1295
Authors:
ANASHIN VV
DEREVYANKIN G
DUDNIKOV VG
MALYSHEV OB
OSIPOV VN
FOERSTER CL
JACOBSEN FM
RUCKMAN MW
STRONGIN M
KERSEVAN R
MASLENNIKOV IL
TURNER WC
LANFORD WA
Citation: Vv. Anashin et al., COLD BEAM TUBE PHOTODESORPTION AND RELATED EXPERIMENTS FOR THE SUPERCONDUCTING SUPER COLLIDER LABORATORY 20 TEV PROTON COLLIDER, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(4), 1994, pp. 1663-1672
Citation: Sk. Guharay et al., H- BEAM BASED PROJECTION MICROLITHOGRAPHY - A CONCEPTUAL STUDY OF THEBEAM PARAMETERS, Review of scientific instruments, 65(5), 1994, pp. 1745-1748
Authors:
BELOV AS
DUDNIKOV VG
KUZIK VE
PLOKHINSKY YV
YAKUSHEV VP
Citation: As. Belov et al., A SOURCE OF POLARIZED NEGATIVE HYDROGEN-IONS WITH DEUTERIUM PLASMA IONIZER, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 333(2-3), 1993, pp. 256-259