Authors: GOTSZALK T GRABIEC P SHI F DUMANIA P HUDEK P RANGELOW IW

Citation: T. Gotszalk et al., FABRICATION OF MULTIPURPOSE AFM SCM/SEP MICROPROBE WITH INTEGRATED PIEZORESISTIVE DEFLECTION SENSOR AND ISOLATED CONDUCTIVE TIP/, Microelectronic engineering, 42, 1998, pp. 477-480

Authors: GRABIEC PB GOTSZALK T SHI F HUDEK P DUMANIA P RANGELOW IW

Citation: Pb. Grabiec et al., THE INTEGRATION OF CMOS WITH PLASMA-ENHANCED MICROMACHINING, Surface & coatings technology, 97(1-3), 1997, pp. 475-480

Authors: GRABIEC PB SHI F HUDEK P GOTSZALK T ZABROWSKI M DUMANIA P RANGELOW IW

Citation: Pb. Grabiec et al., SCANNING PROBE SHARP TIP FORMATION FOR IC INTEGRATION USING MESA TECHNIQUE, Microelectronic engineering, 35(1-4), 1997, pp. 329-332

Authors: LINNEMANN R GOTSZALK T RANGELOW IW DUMANIA P OESTERSCHULZE E

Citation: R. Linnemann et al., ATOMIC-FORCE MICROSCOPY AND LATERAL FORCE MICROSCOPY USING PIEZORESISTIVE CANTILEVERS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(2), 1996, pp. 856-860

Authors: GOTSZALK T LINNEMANN R RANGELOW IW GRABIEC P DUMANIA P

Citation: T. Gotszalk et al., APPLICATION OF PIEZORESISTIVE WHEATSTONE BRIDGE CANTILEVER IN ADVANCED ATOMIC-FORCE MICROSCOPY TECHNIQUES, International journal of electronics, 81(4), 1996, pp. 473-483

Authors: RANGELOW IW SKOCKI S DUMANIA P

Citation: Iw. Rangelow et al., PLASMA-ETCHING FOR MICROMECHANICAL SENSOR APPLICATIONS, Microelectronic engineering, 23(1-4), 1994, pp. 365-368