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Citation: Vc. Venezia et al., Mechanism for the reduction of interstitial supersaturations in MeV-implanted silicon, APPL PHYS L, 74(9), 1999, pp. 1299-1301
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Citation: Jl. Benton et al., Electrical signatures and thermal stability of interstitial clusters in ion implanted Si, J APPL PHYS, 84(9), 1998, pp. 4749-4756