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Results: 1-14 |
Results: 14

Authors: GUI CQ LEGTENBERG R TILMANS HAC FLUITMAN JHJ ELWENSPOEK M
Citation: Cq. Gui et al., NONLINEARITY AND HYSTERESIS OF RESONANT STRAIN-GAUGES, Journal of microelectromechanical systems, 7(1), 1998, pp. 122-127

Authors: IMAI S BURGER GJ LAMMERINK TSJ FLUITMAN JHJ
Citation: S. Imai et al., OUTPUT CHARACTERISTICS OF A THIN-FILM PIEZOELECTRIC AE SENSOR FOR MAGNETIC HEAD-DISK INTERACTION, JSME international journal. Series C, dynamics, control, robotics, design and manufacturing, 40(1), 1997, pp. 33-41

Authors: BURGER GJ SMULDERS EJT BERENSCHOT JW LAMMERINK TSJ FLUITMAN JHJ IMAI S
Citation: Gj. Burger et al., HIGH-RESOLUTION SHADOW-MASK PATTERNING IN DEEP HOLES AND ITS APPLICATION TO AN ELECTRICAL WAFER FEED-THROUGH, Sensors and actuators. A, Physical, 54(1-3), 1996, pp. 669-673

Authors: IMAI S BURGER GJ LAMMERINK TSJ FLUITMAN JHJ
Citation: S. Imai et al., FUNDAMENTAL-STUDY ON A THIN-FILM AE SENSOR FOR MEASUREMENT OF BEHAVIOR OF A MULTI-PAD CONTACT SLIDER, IEEE transactions on magnetics, 32(5), 1996, pp. 3675-3677

Authors: SPIERING VL BERENSCHOT JW ELWENSPOEK M FLUITMAN JHJ
Citation: Vl. Spiering et al., SACRIFICIAL WAFER BONDING FOR PLANARIZATION AFTER VERY DEEP-ETCHING, Journal of microelectromechanical systems, 4(3), 1995, pp. 151-157

Authors: VANKUIJK J LAMMERINK TSJ DEBREE HE ELWENSPOEK M FLUITMAN JHJ
Citation: J. Vankuijk et al., MULTIPARAMETER DETECTION IN FLUID-FLOWS, Sensors and actuators. A, Physical, 47(1-3), 1995, pp. 369-372

Authors: IMAI S TOKUYAMA M HIROSE S BURGER GJ LAMMERINK TSJ FLUITMAN JHJ
Citation: S. Imai et al., A THIN-FILM PIEZOELECTRIC IMPACT SENSOR ARRAY FABRICATED ON A SI SLIDER FOR MEASURING HEAD-DISK INTERACTION, IEEE transactions on magnetics, 31(6), 1995, pp. 3009-3011

Authors: ELWENSPOEK M LAMMERINK TSJ MIYAKE R FLUITMAN JHJ
Citation: M. Elwenspoek et al., TOWARDS INTEGRATED MICROLIQUID HANDLING SYSTEMS, Journal of micromechanics and microengineering, 4(4), 1994, pp. 227-245

Authors: PRAK A FLUITMAN JHJ
Citation: A. Prak et Jhj. Fluitman, APPLICATIONS OF A MODEL FOR SILICON RESONANT SENSORS, Sensors and actuators. A, Physical, 41(1-3), 1994, pp. 251-255

Authors: TILMANS HAC LEGTENBERG R SCHURER H IJNTEMA DJ ELWENSPOEK M FLUITMAN JHJ
Citation: Hac. Tilmans et al., (ELECTRO)MECHANICAL CHARACTERISTICS OF ELECTROSTATICALLY DRIVEN VACUUM ENCAPSULATED POLYSILICON RESONATORS, IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 41(1), 1994, pp. 4-6

Authors: ELWENSPOEK M LAMMERINK TSJ MIYAKE R FLUITMAN JHJ
Citation: M. Elwenspoek et al., SILICON MICROSTRUCTURES FOR FLUID HANDLING, Analusis, 22(9), 1994, pp. 130000009-130000012

Authors: LAMMERINK TSJ TAS NR ELWENSPOEK M FLUITMAN JHJ
Citation: Tsj. Lammerink et al., MICRO-LIQUID FLOW SENSOR, Sensors and actuators. A, Physical, 37-8, 1993, pp. 45-50

Authors: SPIERING VL BOUWSTRA S FLUITMAN JHJ
Citation: Vl. Spiering et al., REALIZATION OF MECHANICAL DECOUPLING ZONES FOR PACKAGE-STRESS REDUCTION, Sensors and actuators. A, Physical, 37-8, 1993, pp. 800-804

Authors: DERIDDER RM SANDER AFM DRIESSEN A FLUITMAN JHJ
Citation: Rm. Deridder et al., AN INTEGRATED-OPTIC ADIABATIC TE TM MODE SPLITTER ON SILICON, Journal of lightwave technology, 11(11), 1993, pp. 1806-1811
Risultati: 1-14 |