Authors:
FUJITA T
FUKUI M
OKADA S
SHIMIZUIWAYAMA T
HIOKI T
ITOH N
Citation: T. Fujita et al., ANOMALOUS DEFECT PROCESSES IN SI IMPLANTED AMORPHOUS SIO2 .2., Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 91(1-4), 1994, pp. 418-421