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Results: 1-10 |
Results: 10
LIFETIME ENHANCEMENT OF A MULTICUSP ION-SOURCE FOR LITHOGRAPHY
Authors: LEE Y GOUGH RA KUNKEL WB LEUNG KN VUJIC J WILLIAMS MD WUTTE D YANG FL
Citation: Y. Lee et al., LIFETIME ENHANCEMENT OF A MULTICUSP ION-SOURCE FOR LITHOGRAPHY, Microelectronic engineering, 42, 1998, pp. 241-244
A 2.45 GHZ ECR ION-SOURCE FOR PRODUCTION OF MEDIUM CHARGE STATES IONS
Authors: WUTTE DC LEITNER MA WILLIAMS MD LEUNG KN GOUGH RA SAADATMAND K BENVENISTE V
Citation: Dc. Wutte et al., A 2.45 GHZ ECR ION-SOURCE FOR PRODUCTION OF MEDIUM CHARGE STATES IONS, Review of scientific instruments, 69(2), 1998, pp. 712-714
MULTICUSP SOURCES FOR ION-BEAM PROJECTION LITHOGRAPHY
Authors: LEE Y GOUGH RA KUNKEL WB LEUNG KN VUJIC J WILLIAMS MD WUTTE D ZAHIR N
Citation: Y. Lee et al., MULTICUSP SOURCES FOR ION-BEAM PROJECTION LITHOGRAPHY, Review of scientific instruments, 69(2), 1998, pp. 877-879
DEVELOPMENT OF THE RADIO-FREQUENCY DRIVEN H- ION-SOURCE FOR THE NATIONAL SPALLATION NEUTRON SOURCE
Authors: LEITNER MA GOUGH RA LEUNG KN RICKARD ML SCOTT PK WENGROW AB WILLIAMS MD WUTTE DC
Citation: Ma. Leitner et al., DEVELOPMENT OF THE RADIO-FREQUENCY DRIVEN H- ION-SOURCE FOR THE NATIONAL SPALLATION NEUTRON SOURCE, Review of scientific instruments, 69(2), 1998, pp. 962-964
QUARTZ ANTENNA FOR RADIO-FREQUENCY ION-SOURCE OPERATION
Authors: LEE Y GOUGH RA LEUNG KN PERKINS LT PICKARD DS VUJIC J WU LK OLIVO M EINENKEL H
Citation: Y. Lee et al., QUARTZ ANTENNA FOR RADIO-FREQUENCY ION-SOURCE OPERATION, Review of scientific instruments, 69(2), 1998, pp. 1023-1025
AXIAL ENERGY SPREAD MEASUREMENTS OF AN ACCELERATED POSITIVE-ION BEAM
Authors: LEE Y GOUGH RA KUNKEL WB LEUNG KN PERKINS LT PICKARD DS SUN L VUJIC J WILLIAMS MD WUTTE D MONDELLI AA STENGL G
Citation: Y. Lee et al., AXIAL ENERGY SPREAD MEASUREMENTS OF AN ACCELERATED POSITIVE-ION BEAM, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 385(2), 1997, pp. 204-208
ION ENERGY SPREAD AND CURRENT MEASUREMENTS OF THE RF-DRIVEN MULTICUSPION-SOURCE
Authors: LEE Y GOUGH RA KUNKEL WB LEUNG KN PERKINS LT PICKARD DS SUN L VUJIC J WILLIAMS MD WUTTE D
Citation: Y. Lee et al., ION ENERGY SPREAD AND CURRENT MEASUREMENTS OF THE RF-DRIVEN MULTICUSPION-SOURCE, Review of scientific instruments, 68(3), 1997, pp. 1398-1402
DEVELOPMENT OF ION SOURCES FOR ION PROJECTION LITHOGRAPHY
Authors: LEE Y GOUGH RA KUNKEL WB LEUNG KN PERKINS LT PICKARD DS SUN L VUJIC J WILLIAMS MD
Citation: Y. Lee et al., DEVELOPMENT OF ION SOURCES FOR ION PROJECTION LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 3947-3950
A COMPACT FILAMENT-DRIVEN MULTICUSP ION-SOURCE
Authors: LEE Y GOUGH RA KUNKEL WB LEUNG KN PERKINS LT PICKARD DS SUN L VUJIC J WILLIAMS MD WUTTE D
Citation: Y. Lee et al., A COMPACT FILAMENT-DRIVEN MULTICUSP ION-SOURCE, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 119(4), 1996, pp. 543-548
PRODUCTION OF MULTIPLY CHARGE-STATE IONS IN A MULTICUSP ION-SOURCE
Authors: WILLIAMS MD DEVRIES GJ GOUGH RA LEUNG KN MONROY M
Citation: Md. Williams et al., PRODUCTION OF MULTIPLY CHARGE-STATE IONS IN A MULTICUSP ION-SOURCE, Review of scientific instruments, 67(3), 1996, pp. 1384-1386
Risultati: 1-10 |