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Authors: GOUSTOURIDIS D NORMAND P TSOUKALAS D
Citation: D. Goustouridis et al., ULTRAMINIATURE SILICON CAPACITIVE PRESSURE-SENSING ELEMENTS OBTAINED BY SILICON FUSION BONDING, Sensors and actuators. A, Physical, 68(1-3), 1998, pp. 269-274

Authors: GOUSTOURIDIS D NORMAND P TSOUKALAS D
Citation: D. Goustouridis et al., MINIATURIZATION OF SI DIAPHRAGMS OBTAINED BY WAFER BONDING, Microelectronic engineering, 42, 1998, pp. 437-440

Authors: CHATZANDROULIS S GOUSTOURIDIS D NORMAND P TSOUKALAS D
Citation: S. Chatzandroulis et al., A SOLID-STATE PRESSURE-SENSING MICROSYSTEM FOR BIOMEDICAL APPLICATIONS, Sensors and actuators. A, Physical, 62(1-3), 1997, pp. 551-555

Authors: GOUSTOURIDIS D CHATZANDROULIS S NORMAND P TSOUKALAS D
Citation: D. Goustouridis et al., A MINIATURE SELF-ALIGNED PRESSURE SENSING ELEMENT, Journal of micromechanics and microengineering, 6(1), 1996, pp. 33-35
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